Achieve highly uniform coating of complex 3-dimensional shapes, wires and fibers with Isoflux's proven and proprietary line of standard and customized Cylindrical Magnetrons.  These Cylindrical Magnetrons are being used by many Fortune 500 Corporations, major Universities and Government entities. Click on "markets and applications" for more info for ideal coating application fits.

 Major Design Features Include:

• Very high target and material utilization
• High deposition rates
• Exceptional Uniformity
• Single or Dual Target Design (and custom 3 or more designs)
• Balanced, Unbalanced and Bar Magnet Orientation
• DC, Pulsed DC, AC
• Maintenance Free

STANDARD Cylindrical Magnetron SIZES

Model 516

Diameter:                       5.50"

Length:                           7.80"

Substrate Opening:           .75"

Target Dimensions:

Length:                           6.5"

Diameter:                       2.0"

Cooling H2O:                  1 GPM

Operating Pressure:        .5mTorr to 20mTorr

Max Continuous Power:   2kW DC

Model 522 UHV

Diameter:                       6.5"

Length:                         18.4"

Substrate Opening:         .75"

Target Dimensions:

Length:                          8.5"

Diameter:                      2.0"

Cooling H2O:                 2 GPM

Operating Pressure:       .5mTorr to 20mTorr

Max Continous Power     5kW DC

* Model 522 UHV is designed to be integrated into the vacuum system in an in-line fashion.  Both ends of the cathode connect to other system components with 4 1/2" metal seal flanges.  The materials in th Model 522 UHV are ultra-high vacuum compatible and bakable to 400 c.

 Model 1921 

Diameter:                      12.8"

Length:                          8.8"

Substrate Opening:         5.75"

Target Dimensions:

Length:                          8.125"

Diameter:                      7.5"

Cooling H2O:                 2 GPM                                                             

Operating Pressure:       .5mTorr to 20mTorr

Max Continous Power:    5kW DC

 Model 3421

Diameter:                      17.0"

Length:                          8.8"

Substrate Opening:         12.0"

Target Dimensions:

Length:                          8.125"

Diameter:                      13.50"

Cooling H2O:                  2 GPM

Operating Pressure:        .5mTorr to 20mTorr

Max Continuous Power:   5kw DC

 Model 1520

Diameter:                       10.60"

Length:                           11.20"

Substrate Opening:         

Target Dimensions: 

Length:                           8.0"

Diameter:                       6.0"

Cooling H2O:                   2 GPM

Operating Pressure:         .5mTorr to 20mTorr

Max Continuous Power:    5kw DC

 Model 2525

Diameter:                      14.90"

Length:                          16.20"

Substrate Opening:           7.0"

Target Dimensions:

Length:                          8.125"

Diameter:                      13.50"

Cooling H2O:                  2 GPM

Operating Pressure:        .5mTorr to 20mTorr

Max Continuous Power:   5kw DC

 Model 3417*

Diameter:                      17.0"

Length:                          8.8"

Substrate Opening:         12.0"

Target Dimensions:

Length:                          8.125"

Diameter:                      13.50"

Cooling H2O:                  2 GPM

Operating Pressure:        .5mTorr to 20mTorr

Max Continuous Power:   5kw DC

 Model 6217

Diameter:                      30.0"

Length:                          7.8"

Substrate Opening:         0"

Target Dimensions:

Length:                          24.25"

Diameter:                      7.0"

Cooling H2O:                  5 GPM

Operating Pressure:        .5mTorr to 50mTorr

Max Continuous Power:   6kw DC

 Custom Sizes

  and Solutions

Isoflux works with its customers to identify the optimum cylindrical magnetron configuration based on the specifics of the coating and process requirements. 

This includes 3 or 4 ... or even 5 target magnetrons for sputtering different materials in the same magnetron cavity with each target being independent of the other to prevent cross contamination. 

Our proven fixturing and shutter mechanisms allow for indexing to each respective target station.  Click on "sputtering systems" for more details.

Simple Target Change 

and Maintenance 

Isoflux's cylindrical magnetrons are nearly maintenance-free and changing targets is as simple as it gets!  They simply slide in and snap in place.  When power is applied to te cathode, thermal expansion results in a pefect, firm fit to the surface.