Isoflux's cylindrical magnetron sputtering tools consist of both standard and custom configurations depending on the specifics of the coating requirements.  All incorporate Isoflux's proprietary cylindrical magnetron technology, which is the "heart" of the system.  Isoflux collaborates with its customers to determine the ideal fit, for the cylindrical magnetron and the functional vacuum system, based on the specific process and production requirements.  The "ICM" line of Isoflux Tools are batch coaters.

Isoflux ICM 10 Tool (Batch Coater):

Design Features:

- Rapid cycle small footprint (approx. 6' x 6') tool

- Fully automated operation

- Major subsystems by leading world class corporations  

- Choice of several Isoflux standard cylindrical magnetrons. 

   Single or dual design (or more depending on application).

- Chamber is a modified NW250 tee, which interfaces 

   with the cylindrical magnetron(s). 

- Simple load / unload with automtically-controlled electric hoist

   for top lid

- Pumping system includes rough pump, turbo and VAT

  3-position throttle valve 

- Water cooling circuits for cathode(s) and turbopump

- Substrate fixturing and shutter(s).  Substrate rotation capability 

   Substrate indexing (multi-cathode configuration)

- Advanced Energy (AE) or Huttinger DC and RF power supplies

- MKS Instruments gas control system

- Vacuum gauging and instrumentation from Granville-Phillips

- Fully automated PLC / PC control system with HMI (Human Machine Interface)

   and several operation and process variable screens

- Safety interlocks and excellent documentation package

- Process calibration and testing by Isoflux

- Installation, test and training

- Options (heat, load lock, etc.) by request

CLICK HERE FOR ICM 10 BROCHURE for more tool information

Isoflux ICM 5 Tool:

Universities and R&D, small inexpensive tool for max. 5" substrate per batch

Available now but technical features coming soon. 

Isoflux Flexible, R2R (Wire) R&D Tool -

                 Call For Details!

Thinking much higher production using this technology?  Isofux and its partners have the capability to offer very high throughput cylindrical magnetron sputtering systems including conventional batch, in-line, R2R (wire) and unique, application-specific system configurations based on the specifics of the coating and throughput requirements.

There are many Isoflux ICM 10 cylindrical magnetron sputtering tools currently being used by major Fortune 500 corporations, Government entities and major Universities worldwide.

Isoflux's R&D lab in Rochester also contains several ICM systems for samples, process development coatings while your tool is being built.

Contact us at (585) 349-0641 or email at info@isofluxinc.com